Abstract Taking “photoresist, the key material for chip manufacturing” as the project-basedlearning theme, this paper carries out the learning design of “chemical reaction of polymers” in the undergraduate course of polymer chemistry. The learning design is started from the introduction of chip manufacture andunderstand the group reaction characteristics of polymers and the synthesis strategy of functional polymer materials by learning the synthesis method of photoresist resin; Then, by studying the photolithographic reaction of photoresist, we can learn the principle of crosslinking and degradation reaction of polymer, and further understand the essence of chemical reaction of polymer; Finally, understand the application and implementation of polymer chemical reaction in actual production through the application of photoresist for chip manufacturing. This learning design will integrate the cutting-edge knowledge of science and technology and practical production with classroom teaching to cultivate students’ spirit of scientific inquiry and innovative consciousness.
LIN Hai-Hui, ZHONG Ming, CHEN Shui-Liang. Project-Based Learning of “Chemical Reaction of Polymers” in Polymer Chemistry Course: Photoresist for Chip Manufacturing[J]. Chinese Journal of Chemical Education, 2024, 45(24): 21-29.
