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化学史与化学史教育
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| 技术和思想融合下人工合成金刚石CVD法的形成和发展 |
| 范永鑫, 袁振东* |
| 河南师范大学化学化工学院 河南新乡 453007 |
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| Formation and Development of Synthetic Diamond CVD Method Under the Fusion of Technology and Thought |
| FAN Yong-Xin, YUAN Zhen-Dong* |
| College of Chemistry and Chemical Engineering, Henan Normal University, Xinxiang 453007, China |
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摘要：20世纪50年代,埃弗索尔首次将化学气相沉积法运用于金刚石的合成,技术的不成熟和思想的禁锢导致以低压为特点的化学气相沉积法被戏称为“炼丹术”。1982年以后,多种CVD技术的开发及低压合成金刚石理论的提出促使人们打破思想禁锢,广泛地关注CVD金刚石。21世纪初期,工艺生长参数和设备方面又一次突破推动着CVD单晶金刚石的成功合成及商业化。总之,从低压尝试到高品质、大质量单晶金刚石合成的过程,体现着技术的进步和思想的发展。
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| 关键词： 化学气相沉积,
CVD金刚石,
单晶金刚石
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收稿日期: 2024-07-26
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通讯作者:
*E-mail:yuanzhendong64@126.com
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| 引用本文: |
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范永鑫, 袁振东. 技术和思想融合下人工合成金刚石CVD法的形成和发展[J]. 化学教育（中英文）, 2025, 46(11): 122-127
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