Greenwood N N, Earnshaw A. Chemistry of the Elements. 2nd ed. Oxford: Butterworth-Heinemann, 1997:329
[2]
Berzelius J. Proceedings of the Royal Science Academy, 1824, 12: 46-98
[3]
科顿 F A,威尔金森 G. 高等无机化学.冯文林,邓希贤,等译.北京:人民教育出版社,1980:422-424
[4]
May G S, Sze S M. Fundamentals of Semiconductor Fabrication. New Jersey: John Wiley & Sons Inc.,2004:41-224
[5]
Zant P V. 芯片制造—半导体工艺制程实用教程.5版. 韩郑生,译.北京:电子工业出版社,2010:5
[6]
Liu W D,Jin X, King Y C, et al. IEEE Transactions on Electron Devices, 1999, 46(5):1070-1072
[7]
Subramanian V, Kedzierski J, Lindert N, et al. A bulk-Si-compatible ultrathin-body SOI technology for sub-100 nm MOSFETs. Device Research Conference Digest, Santa Barbara, CA, 1999
[8]
He Y, Gorman S K, Keith D, et al. Nature, 2019, 571:371-375
Yang B, Chen Y, Shi J.Advanced Materials, 2019,DOI:10.1002/adma.201901778
[20]
Kim J, Lee J E, Lee J, et al. Journal of the American Chemical Society, 2006, 128(3):688-689
[21]
Deng Y, Qi D, Deng C, et al. Journal of American Chemical Society, 2008, 130(1): 28-29
[22]
Lee J E, Lee N, Kim H, et al. Journal of American Chemical Society, 2010, 132(2): 552-557
[23]
Chen Y, Chen H R, Zhang S J, et al. Advanced Functional Materials, 2011, 21(2): 270-278
[24]
Chen Y, Chen H, Zhang S, et al. Biomaterials, 2012, 33(7): 2388-2398
[25]
Zhao Y, You S S, Zhang A, et al. Nature Nanotechnology, 2019, 14(7): 783-790
[26]
Cao X, Cao H, Yu X, et al. Chinese journal of biotechnology, 2009, 25(12): 1882-1886
[27]
饶震红,杜凤沛,李向东.化学教育(中英文),2019, 40(13):1-9
[28]
Exley C. Journal of Inorganic Biochemistry, 1998, 69(3):139-144
[29]
Grtner M, Hermes W, Marudhachalam P, et al. Ullmann’s Encyclopedia of Industrial Chemistry[M]//Moretto H H, Schulze M, Wagner G. Silicones. Weinheim: Wiley-VCH, 2012: 675-708
[30]
罗运军,桂红星,有机硅树脂及其应用. 北京:化学工业出版社,2011: 6-17
[31]
Fouda M M G, Fahmy H M. Carbohydrate Polymers, 2011, 86(2):625-629